CSS

AMS200 / 300 Wafer Inspection System
• 6” and 8” wafer / sawn wafer (SEMI Standard)
• 8” and 12” wafer / sawn wafer (SEMI Standard)
• Programmable motorised stage
• Integrated with Olympus / Evident microscope: MX61 / MX63 / MX61L / MX63L
• Wafer mapping system (SEMI Standard)
• TCP/IP Communication platform
• SECS/GEM (Optional)

APL Automated System
• PLP 500×510 mm / 600×600 mm (SEMI Standard)
• PLP 480x480mm / 700×700 mm (Customised / Non-SEMI Standard)
• Autoloader with AGV interface (Optional)
• Programmable motorised stage with vacuum chuck
• Vision auto-alignment in panel / Q-panel
• TCP/IP Communication platform
• SECS/GEM (Optional)

APL Automated Inspection System
• PLP 500×510 mm / 600×600 mm (SEMI Standard)
• PLP 480x480mm / 700×700 mm (Customised / Non-SEMI Standard)
• Autoloader with AGV interface (Optional)
• Programmable motorised stage with vacuum chuck
• Vision auto-alignment in panel / Q-panel
• Integrated with Olympus / Evident OLS Laser Scanning Microscope
• TCP/IP Communication platform
• SECS/GEM (Optional)