EFE

WS200 / 300 Wafer Sorting System
• 8” and 12” wafer (SEMI Standard)
• Load port: SEMI Standard FOUP / FOSB / Open Cassette (configured up to 3x)
• 4-axis ATM robot sorting and wafer pre-aligner with wafer ID readiness
• Macro inspection (visual top / bottom) (Optional)
• Programmable sorting methods
• TCP/IP Communication platform
• SECS/GEM (Optional)
• OHT / AGV (SEMI Standard) (Optional)
• HEPA FFU (Optional)

WP200 / 300 Wafer Packing System
• 8” and 12” wafer (SEMI Standard)
• Load port: SEMI Standard FOUP / FOSB / Open Cassette (configured up to 3x)
• 4-axis ATM robot sorting and wafer pre-aligner with wafer ID readiness
• Sorting station: FOUP / FOSB / Open Cassette (configured up to 2x)
• Packing station: Canister / Jar / Shipping Box (configured up to 2x)
• Buffering / Bin station: Interleaf / Separator (1x)
• Macro inspection (visual top / bottom) (Optional)
• Programmable sorting / packing / unpacking methods
• TCP/IP Communication platform
• SECS/GEM (Optional)
• OHT / AGV (SEMI Standard) (Optional)
• HEPA FFU (Optional)

ST200 / 300 Wafer Transfer / Loading System
• 8” and 12” sawn wafer (SEMI Standard)
• Load port: Canister / Open Cassette (configured up to 2x)
• 4-axis mechanical robot to transfer / load sawn wafer
• Wafer ID readiness: Barcode
• Transferring station: Canister / Open Cassette (configured up to 2x)
• Buffering / Bin station: Interleaf / Separator (1x)
• Programmable transferring / Load / Unload methods
• TCP/IP Communication platform
• SECS/GEM (Optional)
• HEPA FFU (Optional)